A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2017; you can also visit the original URL.
The file type is application/pdf
.
Effect of water uptake on the fracture behavior of low-k organosilicate glass
2014
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films
Articles you may be interested in The effect of water uptake on the mechanical properties of low-k organosilicate glass Water uptake in porous low-k dielectrics has become a significant challenge for both back-end-ofthe-line integration and circuit reliability. This work examines the effects of water uptake on the fracture behavior of nanoporous low-k organosilicate glass. By using annealing dehydration and humidity conditioning, the roles of different water types and their concentrations are
doi:10.1116/1.4871680
fatcat:yoljtfvienboffoqbvck6k7ku4