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Effect of water uptake on the fracture behavior of low-k organosilicate glass
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films
Articles you may be interested in The effect of water uptake on the mechanical properties of low-k organosilicate glass Water uptake in porous low-k dielectrics has become a significant challenge for both back-end-ofthe-line integration and circuit reliability. This work examines the effects of water uptake on the fracture behavior of nanoporous low-k organosilicate glass. By using annealing dehydration and humidity conditioning, the roles of different water types and their concentrations aredoi:10.1116/1.4871680 fatcat:yoljtfvienboffoqbvck6k7ku4