Sub-sampling Technique to Improve the Measurement Speed of White Light Scanning Interferometry
백색광 주사 간섭계의 측정 속도 개선을 위한 서브 샘플링 기법 연구

In-Bum Chyun, Ki-Nam Joo
2014 Journal of the Korean Society for Precision Engineering  
In this investigation, we explain the sub-sampling technique of white light scanning interferometry (WLSI) to improve the measurement speed. In addition to the previous work using Fourier domain analysis, several methods to extract the height from the correlogram of WLSI are described with the sub-sampling technique. Especially, Fourier-inverse Fourier transformation method adopting sub-sampling technique is proposed and the phase compensation technique is verified with simulation and
more » ... ation and experiments. The main advantage of sub-sampling is to speed up the measurements of WLSI but the precision such as repeatability is slightly poor. In case of measuring the sample which has high height step or difference, the proposed technique can be widely used to reduce the measurement time.
doi:10.7736/kspe.2014.31.11.999 fatcat:bheu7j4hgngrvislmew4w3tat4