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Properties of Nanosontructured Ti-Zr-N Thin Films Prepared by Pulsed Magnetron Sputtering: Applied Power Effect
2017
International Journal of Advances in Mechanical & Automobile Engineering
The effectivness of applied power on structure and tribomechanical properties of Ti-Zr-N films, deposited on AISI304 stainless steel substrate, by pulsed magnetron sputtering PMS technique was investigated. The composition and Ti-Zr-N films properties were varied as the applied power changing from 125 W up to 225 W at a fixed deposition time of 90 min and constant nitrogen / argon gas ratio of 20%. XRD analysis reveals that, formation of FCC structure Ti-Zr-N as a solid solution phase and TiN
doi:10.15242/ijamae.iae0317204
fatcat:yw3sls3fsbexdiq2bt7qph5vd4