Directed batch assembly of three-dimensional helical nanobelts through angular winding and electroplating

D J Bell, T E Bauert, L Zhang, L X Dong, Y Sun, D Grützmacher, B J Nelson
2007 Nanotechnology  
This paper presents a new technique for the directed batch assembly of rolled-up three-dimensional helical nanobelts. The wet etch time is controlled in order for the loose end of the self-formed SiGe/Si/Cr nanobelts to be located over an electrode by taking advantage of the additional angular winding motion in the lateral direction. In a subsequent Au electroplating step, contacts are electroformed and the batch assembly is completed, while at the same time the conductance of the structures is
more » ... f the structures is increased.
doi:10.1088/0957-4484/18/5/055304 fatcat:vizt7bplzzftva4x76nvldstzm