A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2022; you can also visit the original URL.
The file type is application/pdf
.
Model and Verification of a Plasma Etching Reactor with a Switched-Mode Power Converter
2021
2021 IEEE 12th Energy Conversion Congress & Exposition - Asia (ECCE-Asia)
published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rights Copyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights. • Users may download and print one copy of any publication from the public portal
doi:10.1109/ecce-asia49820.2021.9479244
fatcat:l45jevgurjg37jbzzjfavaqyqq