A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2017; you can also visit the original URL.
The file type is application/pdf
.
Adaptive scanning optical microscope (ASOM): large field of view and high resolution imaging using a MEMS deformable mirror
2007
MEMS Adaptive Optics
For a wide range of applications in biology, medicine, and manufacturing, the small field of view associated with high resolution microscope systems poses a significant challenge in practice. This paper describes an optical microscope design, called the Adaptive Scanning Optical Microscope (ASOM), which uses a MEMS deformable mirror working with a specially designed scanning lens to achieve a greatly expanded field of view. Most adaptive optics systems (e.g. telescopes and ophthalmology
doi:10.1117/12.700538
fatcat:jr5ymnpr75bkrkzwcd64qhvude