Micro-probe Auger Analysis of Si Migration in Al Metallization for LSI

Tomoyasu Inoue, Shigeharu Horiuchi, Hiroshi Iwai, Hazime Shimizu, Tetsuo Ishida
1976 Japanese Journal of Applied Physics  
doi:10.7567/jjaps.15s1.63 fatcat:g6xqbdujlrfshkyz6adi3yvciy