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Development Trends and Perspectives of Future Sensors and MEMS/NEMS
2019
Micromachines
With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet
doi:10.3390/mi11010007
pmid:31861476
pmcid:PMC7019281
fatcat:xonfifyeozcsdpxbnk5pbhbyim