Synthesis of AlN Fine Particles by Surface Corona Discharge-CVD
沿面コロナ放電CVDによるAlN微粒子の合成

Yasushi Ohyama, Shigeo Chiba, Kazuyuki Harima, Kazuo Kondo, Kunio Shinohara
1994 Kagaku kogaku rombunshu  
doi:10.1252/kakoronbunshu.20.642 fatcat:ebxkm5lkq5ef7hrehnmvsgveyi