Impact of ALD grown passivation layers on silicon nitride based integrated optic devices for very-near-infrared wavelengths

Amit Khanna, Ananth Z Subramanian, Markus Häyrinen, Shankar Selvaraja, Peter Verheyen, Dries Van Thourhout, Seppo Honkanen, Harri Lipsanen, Roel Baets
2014 Optics Express  
doi:10.1364/oe.22.005684 pmid:24663909 fatcat:jn2tf42znndtffl254jps3uqlu