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Small size structures of diamond-like carbon (DLC) deposited by FIB-CVD contain microscopic non-uniformity in its mechanical properties. This is mainly due to containing Ga implanted by Ga ion irradiation during deposition  . In studying applications ofDLC nanostructures to mechanieal devices, the non-uniform properties cause dienculties in designing nanomechanical deyices. In order to establish a modeling method fbr nanomechanical device design, precise mechanical property evaluation wasdoi:10.1299/jsmelem.2009.5.217 fatcat:ge4qju5rjrer5bigi53fetheai