Small size structures of diamond-like carbon (DLC) deposited by FIB-CVD contain microscopic non-uniformity in its mechanical properties. This is mainly due to containing Ga implanted by Ga ion irradiation during deposition [1] . In studying applications ofDLC nanostructures to mechanieal devices, the non-uniform properties cause dienculties in designing nanomechanical deyices. In order to establish a modeling method fbr nanomechanical device design, precise mechanical property evaluation was

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... died. For the property characterization, several techniques such as transmission electron microscope (TEM), ion implantation simulatien and density measurement by vibration were examined. Then, an analysis model for Finite Element Method (FEM)-based dynamic characteristic designing was built up.