Miniaturization of Piezoelectric Microphones

Stephen Horowitz, Dustin Mathias, Corey Hernandez, Mohan Sanghadasa, Paul Ashley
2010 AIAA Infotech@Aerospace 2010   unpublished
Miniaturization of acoustic sensors offers improved measurement capability to the aeroacoustics community, such as surface mounting with minimal flow perturbation, large bandwidth and improved spatial resolution for measurements in the turbulent boundary layer. Furthermore, reductions in sensor size enable higher-density acoustic arrays, reduced spatial averaging and increased spatial resolution. Regardless of transduction method, fundamental noise mechanisms, however, place a lower bound on
more » ... a lower bound on this miniaturization in order to maintain a desired minimum detectable signal (MDS). This paper presents the results of a theoretical and experimental study into the scaling effects of piezoelectric microphones. The ultimate goal is to drastically reduce sensor size while maintaining a desired MDS. To progress towards that goal, a series of piezoelectric microphones with a range of geometries were designed and fabricated to serve as "test structures". Finally, acoustical and electrical characterization was performed to confirm the scaling.
doi:10.2514/6.2010-3311 fatcat:ol5eswdjubecpg63xk5ixhfd54