Direct generation of optical diffractive elements in perfluorocyclobutane (PFCB) polymers by soft lithography

H. Shah, D. Smith, J. Ballato, S. Foulger, P. Deguzman, G. Nordin
2000 IEEE Photonics Technology Letters  
Optically diffractive line gratings with 0.58-m feature sizes have been generated in 100-m perfluorocyclobutane (PFCB) polymer films by direct micromolding using only a silicon master. Strong reflectivities from the green to red portions of the visible spectrum, depending on incident beam angle, were observed with 3 dB bandwidths of approximately 30 nm. This "negative mold-free" technique permits, for the first time to our knowledge, feature reproduction at submicrometer size scales, eliminates
more » ... scales, eliminates several steps from conventional soft lithographic methods, and marks itself as a practical means for rapidly generating planar photonic structures that operate spectrally in the visible and the near IR telecommunication bands.
doi:10.1109/68.896337 fatcat:3zcmclxnpnct3aoix2lgmkqi6i