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This paper describes a dual-chamber drug delivery microsystem that provides regulated flow from two springpressurized balloon reservoirs using independent microvalves. A preliminary prototype has been constructed with the primary components. Micromachined bulk metal springs (Co-Ni-Cr alloy), with an in-plane spring constant exceeding 300 N/m, are used in conjunction with 18.8 mL reservoirs, and provide 15 kPA pressure when the balloons are fully inflated. A piezoresistive pressure sensor thatdoi:10.1109/memsys.2008.4443640 fatcat:2v6ujr7t45fabktamiurk6x4pm