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Supplementary document for Influence of Temperature and Plasma Parameters on the Properties of PEALD HfO2 - 5223630.pdf

Margarita Lapteva, Vivek Beladiya, Sebastian Riese, Philipp Hanke, Felix Otto, Torsten Fritz, Olaf Stenzel, Andreas Tünnermann, Adriana Szeghalmi
2021 figshare.com  

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Supplementary Material
doi:10.6084/m9.figshare.14561616.v1 fatcat:pnu6ttmxf5hotfq7vol5fvwwpq
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Margarita Lapteva, Vivek Beladiya, Sebastian Riese, Philipp Hanke, Felix Otto, Torsten Fritz, Olaf Stenzel, Andreas Tünnermann, Adriana Szeghalmi. "Supplementary document for Influence of Temperature and Plasma Parameters on the Properties of PEALD HfO2 - 5223630.pdf." figshare.com (2021)