Formation of Nanoporous Anodic Oxide Films on Ti-Al Microchannel Walls

Masashi ISHIDA, Tatsuya OHMI, Masatoshi SAKAIRI, Manabu IGUCHI
2010 Journal of the Japanese Society for Experimental Mechanics  
Fabrication of a nanoporous anodic oxide film on the inner wall of a microchannel was experimented. The microchannel was produced in a titanium body by a powder-metallurgical microchanneling process and was lined with a Ti-Al alloy layer. We found an appropriate anodic condition for an exposed planner surface of the Ti-Al alloy layer. In the case of the microchannel, the growth of the nanoporous oxide film tended to retard deep inside the channel. This problem was easily solved by lengthening the anodic oxidation time.
doi:10.11395/jjsem.10.s210 fatcat:aqgm5srt55hkdbah2os3s5r24u