A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2018; you can also visit the original URL.
The file type is application/pdf
.
Synthesis and Characterization of Pure-Silicazeolite- Beta Membrane
2008
ASEAN Journal on Science and Technology for Development
The semiconductor industry needs low dielectric constant (low k-value) materials to more advance microprocessor and chips by reducing the size of the device features. In fabricate this context, a new material with lower k value than conventional silica ( k = 3.9 -4.2 ) is needed in order to improve the circuit performance. As per the recent International Semiconductor Technology plan, a low-k material with a k = 1.6 will be needed by 2010. The choice of the inorganic zeolite membrane is an
doi:10.3125/asean.v23i4.989
fatcat:sy5d2pswazeqdngdoiqof7myva