Physical problems of gas sensors reliability

V.A. Smyntyna, V.S. Grinevich
2001 International Semiconductor Conference. CAS 2001 Proceedings (Cat. No.01TH8547)  
The main physico-chemical processes instability of their electrical parameters. If which influenced the declination of gas sensors' parameters under exploitation from their operating values were investigated. These parameters are strongly connected with the structural transformations and the changes of band gap states' concentration. the problem of sensors' reliability is solved, it will become possible to create on one and the same substrate the complex "sensor + primary circuit of data
more » ... cuit of data processing", that is an intelligent sensor.
doi:10.1109/smicnd.2001.967495 fatcat:dorr6egvmbgjpmifozzjrfodju