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Performance comparison of micromachined antennas optimized at 5 GHz for RF energy harvester
2019
Indonesian Journal of Electrical Engineering and Computer Science
This paper presents a comparative performance of the antennas fabricated using bulk micromachining and surface micromachining process. The dielectric permittivity of crystal silicon (Si) and glass are ɛ<sub>r</sub> = 11.9 and ɛ<sub>r</sub> = 4.7, respectively are considered in the substrates comparison studied. The research aims to discover the best antenna performance by alternative micromachining modes for integrating with the RF harvester printed circuit design. Here, the study on
doi:10.11591/ijeecs.v15.i1.pp258-265
fatcat:oforybjsznhfpprvogcyfxa3oe