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Automated Dimensional Analysis Using A Light-Sectioning Microscope
1989
Precision Instrument Design
A computer vision system has been integrated with a modified light-sectioning microscope for the quality control and inspection of a machined part whose critical dimensions are in the range of 30 to 300 pm. Height measureinents were determined by analysis of the projected light-section line. Transverse measurements were made using the microscope in a traditional configuration with illumination from selected elements of an external LED ring array. The light section irradiance was under computer
doi:10.1117/12.950976
fatcat:fs7zdpl6u5b35g77km7wj3iqwm