Fabrication of Glass-Made Nanoslit Channels Using Vacuum Ultra Violet Light

Tetsuro TSUJI, Yuki MATSUMOTO, Satoyuki KAWANO
2019 The Proceedings of Mechanical Engineering Congress Japan  
doi:10.1299/jsmemecj.2019.j22108 fatcat:ne3anntygzdqbnx4oxsbjk73xa