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A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes

H.D. Tong, F.C. Gielens, H.T. Hoang, J.W. Berenschot, M.J. De Boer, J.G.E. Gardeniers, H.V. Jansen, W. Nijdam, C.J.M. van Rijn, M.C. Elwenspoek
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)  

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Pd-Ag) alloy membrane is fabricated with a sequence of well-known thin film and micromachining techniques. A microfabrication process also creates a robust wafer-scale membrane module, which is easy to be integrated into a membrane holder to have gastight connections to the outer world. The microfabricated membranes have been tested to determine the mechanical strength, ' hydrogen permeability and hydrogen selectivity. The membranes have high mechanical strength and can withstand pressures up
more » ... 3 bars at room temperature. High flow rates of up to 3.6 mol H2 /m2.s have been measured with a minimal selectivity of 1500 for H2/He. The membranes survived operation at 450 OC, which is a temperature relevant for practical application in industry, for more than 1000 hours. A thin but strong and defect free palladium-silver 0-7803-7731 -1 /03/$17.00 02003 IEEE
doi:10.1109/sensor.2003.1217122 fatcat:m746qatp3fdmjl46ta75mp5tae
Citation

H.D. Tong, F.C. Gielens, H.T. Hoang, J.W. Berenschot, M.J. De Boer, J.G.E. Gardeniers, H.V. Jansen, W. Nijdam, C.J.M. van Rijn, M.C. Elwenspoek. "A hydrogen separation module based on wafer-scale micromachined palladium-silver alloy membranes." TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)