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Phase Transformation and Physical Properties of Al N-Co Film
Asian Journal of Chemistry
Annealing techniques were applied to induce phase transformations and phase separations in Al N-Co thin films with various Co contents and Al N-Co multilayer thin films with various layer-thicknesses were prepared by a two-facing-target type DC sputtering system. X-ray diffraction and electron diffraction techniques were used to examine the behaviour of phase transformations and phase separations. The transmission electron microscopy was also used to evaluate the microstructure changes in thedoi:10.14233/ajchem.2013.oh114 fatcat:yw3nhsm6pvf33kxd4x65grg6we