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We present an overview of the emerging and enabling miniature MEMS-based components for the terahertz frequencies. The usage of miniature MEMS integrated within the terahertz components is an uprising field of research, which offers reconfigurability, improved performance, and ability to perform unprecedented functions that cannot be achieved using the state-of-the-art semiconductor and optical technologies. In this paper, we discuss the recent progress and future of miniature MEMS-baseddoi:10.1109/jmems.2020.2992491 fatcat:thadjyaypzdpff24x4lbpheqfy