Novel cantilever for biosensing applications

O.G. Karhade, S.S. Chiluveru, P.R. Apte
2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (IEEE Cat. No.04CH37530)  
Chemomechanical actuation of a microcantilever beam induced by biomolecular binding such as DNA hybridization and antibody-antigen binding is an important principle useful in biosensing applications. As the magnitude of the forces involved is very small, increasing the sensitivity of the microcantilever beams involved is a priority. In this paper we are considering to achieve this by structural variation of the cantilevers. Merely decreasing the thickness of the microcantilever may improve the
more » ... er may improve the sensitivity, but it gives rise to the disadvantages of 'arching' and lesser reliability due to greater probability of defects during fabrication. We consider a 'ribbed' cantilever that eliminates the disadvantages while improving the sensitivity simultaneously. Simulations for validation have been performed using the finite element analysis software ANSYS 8.0. The simulations reveal that a ribbed microcantilever is almost as sensitive as a thin cantilever and has relatively very low arching effect. Simulations also reveal that higher the arching lower is the sensitivity.
doi:10.1109/asmc.2004.1309606 fatcat:eblavxtlpngcrkskf3vefx75qm