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D4.2 - On-chip Biosensing with high-Q Amorphous Silicon Microdisk Resonators

T. Lipka, J. Amthor, H.K. Trieu, J. Müller, AMA Association For Sensor Technology E.V., Sophie-Charlotten-Str. 15, 14059 Berlin, Germany
2013

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Low-loss hydrogenated amorphous silicon (a-Si:H) microdisk resonators which are employed as evanescent field refractive index sensors are presented. The resonances of the whispering gallery modes exhibit extinction ratios of >25dB and Q-factors ~10 4 in aqueous solutions. A sensitivity as high as >400nm/RIU was measured for NaCl-solved in DI-water. The resonators intrinsic limit of detection was calculated to be LOD=3.3x10 -4 and the minimum detectable amount of NaCl was experimentally
more » ... d to be 0.0375%. The measurements of the photonic evanescent field microdisk sensors prove that hydrogenated amorphous silicon photonic resonators can be exploited for label-free lab-onchip sensing applications.
doi:10.5162/sensor2013/d4.2 fatcat:hfrmuzwgsfcwjhf32tu2y6jc3e
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T. Lipka, J. Amthor, H.K. Trieu, J. Müller, AMA Association For Sensor Technology E.V., Sophie-Charlotten-Str. 15, 14059 Berlin, Germany. "D4.2 - On-chip Biosensing with high-Q Amorphous Silicon Microdisk Resonators." (2013)