Novel Monolithic Silicon Probes with Flexible Parylene Cables for Neural Prostheses

Changlin Pang, Sam Musallam, Yu-Chong Tai, Joel W. Burdick, Richard A. Andersen
2006 2006 International Conference on Microtechnologies in Medicine and Biology  
This work presents the first parylene-insulated silicon probes, which are used for neural prostheses to record high-level cognitive neural signals. With parylene technology, our probes have several advantages compared with the current devices. First, instead of inorganic materials (e.g. SiO 2 and Si 3 N 4 ), the electrodes and conduction traces on the probes are insulated by parylene, an easily-deposited polymer with mechanical flexibility and biocompatibility. As a result, the probes exhibit
more » ... he probes exhibit better electrical and mechanical properties. Second, flexible parylene cables are monolithically integrated with the probes, which arm the probes with very high flexibility to be easily assembled to a high density 3-D array and at the same time provide an ideal method to transmit neural signals through skull during chronic recording. The all dry fabrication process and an 8×2 probe array (64 electrodes) were demonstrated. The probes were successfully tested electrically and mechanically in rat and monkey cortex. Neural signals were properly recorded.
doi:10.1109/mmb.2006.251491 fatcat:dicc2ta3ovdehgihak7nzp554e