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2006 International Conference on Microtechnologies in Medicine and Biology
This work presents the first parylene-insulated silicon probes, which are used for neural prostheses to record high-level cognitive neural signals. With parylene technology, our probes have several advantages compared with the current devices. First, instead of inorganic materials (e.g. SiO 2 and Si 3 N 4 ), the electrodes and conduction traces on the probes are insulated by parylene, an easily-deposited polymer with mechanical flexibility and biocompatibility. As a result, the probes exhibitdoi:10.1109/mmb.2006.251491 fatcat:dicc2ta3ovdehgihak7nzp554e