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2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)
FRONTISPIECE Finer than a strand of hair, are a thousand subtle points here: Not everyone who tonsured head, the way of the friars knoweth! 1 Hāfez Fourteenth-Century Persian Poet 1 Translated from Persian by the author. ii DEDICATION To my parents: Those to whom I owe whatever I have learned and whatever I have achieved, and To my sister: For her all-time support and understanding. iii ACKNOWLEDGMENTS First, I would like to express my most sincere appreciation to my thesis advisor, Professordoi:10.1109/memsys.2012.6170183 fatcat:hhdpxrisxjcwhgewfkgcktimra