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Fabrication Control of the Resonance Frequencies of High-Index-Contrast Microphotonic Cavities
2006
Integrated Photonics Research and Applications/Nanophotonics
unpublished
Preserved Fulltext
Microphotonic filters require precise control of the relative resonance frequencies of integrated dielectric micro-cavities. Using high-index-contrast microring resonators, we present, demonstrate, and analyze techniques allowing small and accurate corrections of resonance frequencies at fabrication.
doi:10.1364/ipra.2006.jwa3
fatcat:kmzy4425hzabpmppy2ck7pccsi