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To take full advantage of the high beam current capability of the Optima XEx on photoresist implants, a new, real-time uniformity correction scheme, IntelliScan, was developed. IntelliScan compensates for the dose asymmetry in beam-scan direction developed by charge exchange reactions due to severe photoresist outgassing. It continuously modifies the 1 KHz beam-scan waveform in real-time, according to instantaneous vacuum level in the angle corrector area. Since IntelliScan does not involve anydoi:10.1063/1.4766549 fatcat:iop7dsgsvjbphfukzxh26zarna