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Outgassing rate of stainless steel and carbor film deposited by ECR plasma
ステンレス鋼表面及びECRプラズマにより作成された炭素膜表面からのガス放出特性
1987
Shinku
ステンレス鋼表面及びECRプラズマにより作成された炭素膜表面からのガス放出特性
Preserved Fulltext
