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Jordan Journal of Mechanical and Industrial Engineering
This paper describes a number of computer aided design (CAD) tools that are used in the development of surface micromachined mechanisms. It investigates the application of parametric or constraint-based CAD in the design of these mechanisms. Parametric CAD facilities are compared with conventional CAD facilities in this paper. The advantages and limitations of conventional and parametric CAD are illustrated by describing their application in designing an electrostatically actuated crescent pumpfatcat:duobdq5cgfbapgr26hws7df2xi