Computer Aided Design Tools in the Development of Surface Micromachined Mechanisms

Mohammad Kilani
2011 Jordan Journal of Mechanical and Industrial Engineering   unpublished
This paper describes a number of computer aided design (CAD) tools that are used in the development of surface micromachined mechanisms. It investigates the application of parametric or constraint-based CAD in the design of these mechanisms. Parametric CAD facilities are compared with conventional CAD facilities in this paper. The advantages and limitations of conventional and parametric CAD are illustrated by describing their application in designing an electrostatically actuated crescent pump
more » ... mechanism, which was fabricated in five levels of silicon using Sandia"s Ultraplanar Multilevel Micromachining Technology (SUMMiT-V). The paper also describes the application of visualization and motion simulation tools in designing surface micromachined mechanisms.