Measurement Uncertainties for Vacuum Standards from a Low to an Ultra-high Vacuum

S.S. Hong, Y.H. Shin, J.Y. Lim
2014 Applied Science and Convergence Technology  
The Korea Research Institute of Standards and Science (KRISS) has three major vacuum systems: an ultrasonic interferometer manometer (UIM; Section II, Figs. 1 and 2) for a low vacuum, a static expansion system (SES; Section III, Figs. 3 and 4) for a medium vacuum, and an orifice-type dynamic expansion system (DES, Section IV, Figs. 5 and 6) for high and ultra-high vacuum systems. For each system, explicit measurement model equations with multiple variables are given. According to ISO standards,
more » ... g to ISO standards, all of these system variable errors were used to calculate the expanded uncertainty (U). For each system, the expanded uncertainties (k = 1, confidence level = 95%) and relative expanded uncertainty (expanded uncertainty/generated pressure) levels are summarized in Table 4 . Within the uncertainty limits, our bilateral and key comparisons [CCM.P-K4 (10 Pa to 1 kPa)] are extensive and in good agreement with those of other nations ( Fig. 8 and Table 5 ).
doi:10.5757/asct.2014.23.3.103 fatcat:27njpamzhfe3dgtpai42opjqsu