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Conductance measurement of a conical tube and calculation of the pressure distribution
2006
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films
͑͒ In recent articles ͓J. Gomez-Goni, and P. J. Lobo J. Vac. Sci. Technol. A 21, 1452 ͑2003͒; P. Swemin and M. Niewinski, Vacuum 67, 359 ͑2002͔͒ the conductance of conical tube in the molecular flow regime has been calculated using the Monte Carlo method or by the resolution of the Clausing integral equation, reformulated by Iczkowski et al. ͓J. Phys. Chem. 67, 229 ͑1963͔͒, for the case of a cone. The comparison between the analytical values and different simulations allows one to determine a
doi:10.1116/1.2187996
fatcat:kxkubxr2ozerfn3fhmt56eafze