Internet Archive Scholar

Thin film shape memory alloys and microactuators

Y.Q. Fu, J.K. Luo, A.J. Flewitt, W.M. Huang, S. Zhang, H.J. Du, W.I. Milne
2009 International Journal of Computational Materials Science and Surface Engineering  

Preserved Fulltext

fulltext thumbnail
Web Archive Capture PDF (938.0 kB)
https://web.archive.org/web/20170808113107/http://home.eps.hw.ac.uk/~ryf1/Int%20J%20Compu%20Mater%20Sci%20Surf%20Engng-2-2009-208.pdf

A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2017; you can also visit the original URL. The file type is application/pdf.

For Micro-electro-mechanical System (MEMS) applications, TiNi-based thin film Shape Memory Alloys (SMAs) possess many desirable properties, such as high power density, large transformation stress and strain upon heating and cooling, superelasticity and biocompatibility. In this paper, recent development in TiNi-based thin film SMA and microactuator characterisation is mainly focused on crystal nucleation and growth during annealing, film thickness effect, film texture, stress induced surface
more » ... ief, wrinkling and trenches as well as Temperature Memory Effect (TME). The microactuator applications are mainly focused on microvalve and microcage for biological applications, micromirror for optical applications and data storage using nanoindentation method.
doi:10.1504/ijcmsse.2009.027483 fatcat:z7jhv2n4z5gprnsswufjpl5wvi
Citation

Y.Q. Fu, J.K. Luo, A.J. Flewitt, W.M. Huang, S. Zhang, H.J. Du, W.I. Milne. "Thin film shape memory alloys and microactuators." International Journal of Computational Materials Science and Surface Engineering 2.3/4 (2009) 208