Substrates for zero temperature coefficient Love wave sensors

B. Jakoby, M.J. Vellekoop
2000 IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control  
Microacoustic Love wave delay lines show high sensitivity to perturbations such as mass depositions on the wave-guide surface. Furthermore, because of their shear polarization, Love waves are ideally suited for liquid sensing applications. Using a Love wave delay line as feedback element in an oscillator allows the realization of viscosity sensors, and, using a chemical interface, chemical sensors, where the output signal is the oscillation frequency. To achieve a high effective sensitivity,
more » ... ive sensitivity, the cross-sensitivity to temperature has to be kept low. We outline the proper choice of a material and especially focus on the influence of crystal cut and the major device design parameters (mass sensitivity and coupling coefficient) on the temperature coefficient of the sensor.
doi:10.1109/58.842059 pmid:18238599 fatcat:6ubui7jd4jbonimv5wfva6oowu