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Design of ZnO:Al films with optimized surface texture for silicon thin-film solar cells
2006
Photonics for Solar Energy Systems
This study addresses the design of radio frequency (rf) magnetron sputtered aluminum doped zinc oxide (ZnO:Al) front contacts for silicon thin-film solar cells. Optimized films comprise high conductivity and transparency, as well as a surface topography trapping the light within the photovoltaically active layers. We have investigated the influence of the doping level of the target as well as the substrate temperature during sputter deposition on the ZnO:Al properties. The aluminum content in
doi:10.1117/12.661667
fatcat:hfcm2ts5bjbkjigqpzug5hffhu