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On-chip hotplate for temperature control of CMOS SAW resonators
2008
2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Substrate Ground Shield Reflector Reflector Input IDT Output IDT SiO Fig.1. Implementation of a two-port SAW resonator structure in CMOS. For clarity, the piezoelectric ZnO layer is not shown [1], SiO2 ZnO Metal 1 Si Substrate Polysilicon Transducer Fig. 2. Cross-section of CMOS SAW Resonator with embedded heaters Abstract-Due to the sensitivity of the piezoelectric layer in surface acoustic wave (SAW) resonators to temperature, a method of achieving device stability as a function of
doi:10.1109/dtip.2008.4752955
fatcat:dijhjxea4jb77d4awemkm3rz2i