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Phase Retrieval Algorithm for Form Testing Metrology in Production Environment
unpublished
Form testing interferometry permits a fast, non-tactile and full-field quantitative phase imaging of components in ultra precise manufacturing. To reduce the influence of vibrations under manufacturing conditions, it is most common to use the FT-based spatial carrier phase measurement technique (SCPM) which requires only a single interferogram recording. The utilization of a generalized, relatively new spatial phase-shifting method operating in the position space opens up prospects for reduced
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