Rapid Cross-Section TEM Specimen Preparation of III-V Materials

R. Beanland
2003 Microscopy Today  
AbstractCross-section transmission electron microscope (TEM) specimen preparation of Ill-V materials using conventional methods can be a painful and time-consuming activity, with a day or more from receipt of a sample to examination in the TEM being the norm. This article describes the cross-section TEM specimen preparation technique used at Bookham Caswell. The usual time from start to finish is <1 hour. Up to 10 samples can be prepared at once, depending upon sample type. Most of the tools
more » ... d are widely available and inexpensive, making the technique ideal for use in institutions with limited resources.
doi:10.1017/s1551929500052305 fatcat:dvinhow64nh3nlbsgrmttw2gly