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Rapid Cross-Section TEM Specimen Preparation of III-V Materials
2003
Microscopy Today
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AbstractCross-section transmission electron microscope (TEM) specimen preparation of Ill-V materials using conventional methods can be a painful and time-consuming activity, with a day or more from receipt of a sample to examination in the TEM being the norm. This article describes the cross-section TEM specimen preparation technique used at Bookham Caswell. The usual time from start to finish is <1 hour. Up to 10 samples can be prepared at once, depending upon sample type. Most of the tools
doi:10.1017/s1551929500052305
fatcat:dvinhow64nh3nlbsgrmttw2gly