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Precision microcomb design and fabrication for x-ray optics assembly

Yanxia Sun, Ralf K. Heilmann, Carl G. Chen, Craig R. Forest, Mark L. Schattenburg
2003 Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena  

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doi:10.1116/1.1621668 fatcat:bi2j4oxipzhhrbpc52t3ncbte4
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Yanxia Sun, Ralf K. Heilmann, Carl G. Chen, Craig R. Forest, Mark L. Schattenburg. "Precision microcomb design and fabrication for x-ray optics assembly." Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena 21.6 (2003) 2970