A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2017; you can also visit the original URL.
The file type is application/pdf
.
Rayleigh scattering, mode coupling, and optical loss in silicon microdisks
2004
Applied Physics Letters
High refractive index contrast optical microdisk resonators fabricated from silicon-on-insulator wafers are studied using an external silica fiber taper waveguide as a wafer-scale optical probe. Measurements performed in the 1500 nm wavelength band show that these silicon microdisks can support whispering-gallery modes with quality factors as high as 5.2 x 10^5, limited by Rayleigh scattering from fabrication induced surface roughness. Microdisks with radii as small as 2.5 microns are studied,
doi:10.1063/1.1811378
fatcat:75wz5yfe5ngfxmd2q2dwr3fcra