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Enhanced Current Transportation in Siliconriched Nitride (SRN)/Silicon-riched Oxide (SRO) Multilayer Nanostructure
A novel structure of silicon-riched nitride (SRN)/silicon-riched oxide (SRO) is proposed and prepared using RF reactive magnetron co-sputtering. High temperature annealing of SRN/SRO multilayers leads to formation of Si nanocrystals (NC) from isolating SRN and SRO layers simultaneously, which efficiently improves carrier transport ability compared to conventional SRN/Si3N4 counterpart. Micro-Raman scattering analysis reveals that SRN layer has dominating number of denser and smaller Si NCs,doi:10.1007/bf03353715 fatcat:s3k7cpnbknbuxadbvc4uaz6hfi