Ultra-thin nanograin polysilicon devices for hybrid CMOS-NANO integrated circuits

Serge Ecoffey
2007
Laboratoire d'électronique générale 2 SECTION DE GÉNIE ÉLECTRONIQUE A mes parents Acknowledgements I would have been surely unable to finish my PhD without the great help of the numerous people that contributed to this work at the scientific level but also, and especially, at the human level. I then wish to truly thank all these people very much. Of course my first thought goes to Prof. Adrian Ionescu, who gave me the opportunity and the privilege to realize my PhD in his laboratory. He was my
more » ... irector for more than five years, therefore I am very grateful to him for everything he taught me, all the good advices he gave me, and particularly the continuous confidence he showed me along these years. My second thought, and warm gratitude, goes naturally to Dr. Didier Bouvet, who was my PhD "coach" from the beginning. I came to the electronics laboratory with a material science background and Didier had the tough task, and enormous patience, to teach me quite everything about silicon technology and the work in the clean room.
doi:10.5075/epfl-thesis-3722 fatcat:hqyihx5rubabxpudmenmitjo34