Controlled drive-in and precipitation of hydrogen during plasma hydrogenation of silicon using a thin compressively strained SiGe layer

F. Okba, N. Cherkashin, Z. Di, M. Nastasi, F. Rossi, A. Merabet, A. Claverie
2010 Applied Physics Letters  
doi:10.1063/1.3467455 fatcat:k77ahyqd3rguzkktikbailoccm