Performance of an Ultra-High Vacuum System Employing Sorption Pump and Getter-Ion Pump

Zenjiro ODA, Tatsuo ASAMAKI
1963 Shinku  
The performance of an experimental ultra-high vacuum system employing the combination of a sorption pump and a getter-ion pump is described. Measurements done on this system using dry air indicate that the most suitable pressure for switching-on the getter-ion pump is 1•'2•~10-2 mmHg, and for
doi:10.3131/jvsj.6.89 fatcat:u6lmpplvczh7fiea6lkizzthpi