A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2021; you can also visit the original URL.
The file type is application/pdf
.
Influences of Microstructure Parameters on the Throttling Coefficient and Rotational Stiffness of Aerostatic Guideway
2021
Journal of Mechanical Engineering
Abstract:The small multi-throttle aerostatic guideway is the critical component to solve the high precision and high acceleration motion demand of the lithography machine. Generally, microstructures such as recesses and grooves are added to the working surface to improve the capacity characteristics. However, the influence of microstructure parameters on mechanical properties, especially the rotational stiffness of the guideway is not clear enough. In order to establish the analytical
doi:10.3901/jme.2021.03.087
fatcat:75k533kttzbanhfuzpnknhgzge