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F205 Heat and mass transfer under an EMCZ condition
F205 EMCZシリコン結晶育成時の熱と物質の輸送現象(オーガナイズドセッション17 : 材料およびデバイス製造の熱工学)
2001
Proceedings of thermal engineering conference
F205 EMCZシリコン結晶育成時の熱と物質の輸送現象(オーガナイズドセッション17 : 材料およびデバイス製造の熱工学)
Preserved Fulltext
This paper aims to stuCly mechanism of hea1 and mass trans「 er in silicon melt undcr elcctromagne [ icl Czochralski growth 〔 EMCZ ) . The EMCZ me [ hod is a one of Ihe candida [ e method 【o reduce Clensity of voids in which a lo [of vacancies are agglomcrateCl . Th 巳 experimenta ]works r巳vealed [ haL hea[and ass ef oxygen impurity was enhanced i冂 the EMCZ me [ hod, while the rnechanism of such enhancement is no 【 clarified . Thc objec 【oflhe presentwork is to clarify [ he cnhancement m 巳chanism
doi:10.1299/jsmeptec.2001.0_567
fatcat:dbybkkcrvvayjnfzii4f6cxq44