A microfabricated electrocutaneous tactile display

N.P. Ostrom, K.A. Kaczmarek, D.J. Beebe
Proceedings of the First Joint BMES/EMBS Conference. 1999 IEEE Engineering in Medicine and Biology 21st Annual Conference and the 1999 Annual Fall Meeting of the Biomedical Engineering Society (Cat. No.99CH37015)  
An electrocutarteous tactile display was developed and built using modern microfabrication and lithographic techniques. Photosensitive polymers and ultra-thick photosensitive resists were used to fabricate closely spaced electrodes. Electrodes in the nine point array are spaced 2.4 mm (center-to-center), with 200 pm deep gaps between each electrode. The concentric 700 pm wide gap around each electrode prevents arcing and shorting.
doi:10.1109/iembs.1999.803993 fatcat:vbkooazvfjfgdnbjntkfxtnwmi