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Surface germylation process for KrF excimer laser lithography

Yasuhiro Yoshida, Hirofumi Fujioka, Tetsuro Hanawa, Shinji Kishimura, Hitoshi Nagata
1992 Journal of Photopolymer Science and Technology (Fotoporima Konwakai shi)  

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doi:10.2494/photopolymer.5.169 fatcat:kgdysor25rco3nrok5f5s25v2i
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Yasuhiro Yoshida, Hirofumi Fujioka, Tetsuro Hanawa, Shinji Kishimura, Hitoshi Nagata. "Surface germylation process for KrF excimer laser lithography." Journal of Photopolymer Science and Technology (Fotoporima Konwakai shi) 5.1 (1992) 169-172